IAS offers a complete line of PRECISION thermocouples designed to meet the stringent temperature control requirements of advanced semiconductor manufacturers. Single and multi-junction designs are available with standard male connectors, mini plugs or extended leads to match your furnace configuration. You may also choose from clear fused quartz sheaths, with or without a ball or socket joint, or protective Pyrex shipping tubing for diffusion tubes with fixed thermocouple sheaths. Any probe length may be specified with a choice of R, S, B or K-type wire.
Also, IAS manufactures a line of precision control spikes in both single and double designs with a choice of three tip configurations and teflon and fiberglass insulations. The recessed and wedge tip styles are specially designed to prevent contact between the thermocouple junction and the diffusion tube.
Systems that require LPCVD and Atmospheric Cantilevers can utilize our line of custom built cantilevers. We offer Silicon Carbide Paddle Holders that are compatible with all Norton paddle sizes and Crystar Dual Rod Paddles with either quartz or alumina sheathing. These low particulate level LPCVD loaders may be used for all LPCVD processes. Our non-contact furnace loaders are designed for ultra-low particulate levels in all atmospheric processes. IAS cantilevers are easily retrofitted in the field to any type of LPCVD furnace and load station. IAS also offers a full line of furnace drives for use with cantilevers in system upgrades.

            You can review the design details of these devices in the thermocouple and cantilever pages at this site. These designs are available in a wide range of configurations and features. You can select and specify the devices you need according to our easy-to-understand part numbering scheme given on these pages.  You may place an order for these products online using the order form at this site. We will contact you regarding the pricing and delivery of your order.. If our standard products do not fit your needs, we would be happy to custom build to fit your requirements. We encourage you to contact us. You may also find answers to any questions you have in our list of frequently asked questions at this site.
 

Intech Automation Systems Corporation, 3941 Holly Drive, Suite F, Tracy, CA 95304, USA
Phone: (209) 836-8610   Fax: (209) 836-1066  E-mail: sales@IASIntechAutomation.com

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