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FAQ
Frequently Asked
Questions about products and services |
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IAS builds to customer specifications low particulate level loaders for all LPCVD processes. IAS LPCVD Cantilevers are easily retrofitted in the field to any type of
LPCVD furnace and load station. IAS also offers a full line of furnace drives for use with its cantilevers in system upgrades. |
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IAS LPCVD Cantilever
Design Features |
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- Crystar rods supplied with enhanced rod sealing bellows mechanisn
- Slip removable paddle requiring no seals
- Six-axis finger adjusted head assembly with quick disconnect for easy removal
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- Load size of up to 300 wafers
- 4 x 10" SCCS He leak integrity
- Wafer diameters up to 200 mm
- Companion LPCVD vacuum seal flanges available
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Silicon Carbide Paddle
- Compatible with all Norton paddle sizes.
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Dual Rod Paddle
- Crystar
- Quartz sheated silicon carbide
- Quartz sheated alumina
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Intech Automation Systems Corporation,
3941 Holly Drive, Suite F, Tracy, CA 95304, USA
Phone: (209) 836-8610 Fax: (209)
836-1066 E-mail: sales@IASIntechAutomation.com
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Please contact our Webmaster
with questions or comments.
Content © Copyright 1999 Intech Automation Systems Corporation All rights reserved.
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