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FAQ
Frequently
Asked Questions about products and services |
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IAS builds to customer specifications non-contact furnace loaders for ultra-low particulate levels in all atmospheric processes. IAS Atmospheric Cantilevers are easily
retrofitted in the field to any type of furnace and load station. IAS also offers a full line of furnace drives for use with its cantilevers in system upgrades. |
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IAS Atmospheric Cantilever
Design Features |
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- Six-axis finger adjusted head assembly with quick disconnect for easy remova.
- Spring-loaded stainless-steel cover for efficient scavenger seal.
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- Load size of up to 300 wafers
- All atmospheric process temperatures up to 1250 deg C
- Wafer diameters up to 200 mm.
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Silicon Carbide Paddle
- Compatible with all Norton paddle sizes.
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Dual Rod Paddle
- Crystar
- Quartz sheated silicon carbide
- Quartz sheated alumina
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Intech Automation Systems Corporation,
3941 Holly Drive, Suite F, Tracy, CA 95304, USA
Phone: (9209 836-8610 Fax: (209)
836-1066 E-mail: sales@IASIntechAutomation.com
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Please contact our Webmaster
with questions or comments.
Content © Copyright 1999 Intech Automation Systems Corporation All rights reserved.
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